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Fine Chemical Distillation Technology

Specialty gases are critical materials for the semiconductor, light-emitting diode, and flat-panel display industries. They are primarily utilized in lithography, etching, thin film, and diffusion processes. The demand for specialty gases continues to rise in tandem with industry expansion. Ingentec's Fine Chemical Distillation technology is at the forefront, employing a unique three-cut design to produce 99.9999% (6N) ultra-high purity specialty gases, thereby enhancing semiconductor production process yields.

Production Process

​Ingentec manages all aspects of the production process, from whole plant design, assembly, and construction to mass production and operation, independently. Their comprehensive expertise encompasses electronic grade, steel cylinder manufacturing purification, gas mixing, ultra-high-purity gas filling, trace analysis, as well as special component design and assembly, covering the six-step production process.

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Gas Cylinder Manufacturing

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Ultra-High-Purity Gas Filling

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Purification/Distillation

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Analysis

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Blending

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Special Component Design and Assembling

Product List & Application

We offer a range of high-purity specialty gases to support various semiconductor production processes, including lithography, etching, thin film, and deposition & equipment clean.

Lithography

  • Kr/Ne

  • F2/Kr/Ne

  • Xe/Ar/Ne

  • F2/Ar/Ne

  • H2/Ne

  • HCI/H2/Ne

Etching

  • CF4

  • C3F8

  • C4F6

  • CH2F2

  • SF6​

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Thin Film

  • SiF4

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Deposition &
Equipment Clean

  • F2/N2

  • Xe

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Product Features

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High Quality

  • Proprietary ultra-high gas purification technology at N6 level (99.99999%), along with a complete manufacturing process.
industry worker

High Efficiency

  • Proprietary human-machine interface with high automation.​​

Image by Tommy Tsao

Localization

  • Localized production in Taiwan, ensuring all process quality and quick time to market.
Green Pastures

Eco-friendly Factory

  • Environmentally friendly factory design featuring zero waste gas and water emissions.
Semiconductor

Cut-Edge Technology

  • Utilized our 3-cut Purification and Distillation technology in advanced semiconductor standard processes.
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